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2023 International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY
Author Index

Table of Contents:   A  B  C  D  E  F  G  H  I  J  K  L  M  N  O  P  R  S  T  U  W  X  Y  Z  

A

Ago, Hiroki (Kyushu Univ.)   (P-3)
Ago, Hiroki (Kyushu Univ.)   (FB-1)
Ahn, Sung Woo (R&D Team , UP Chemical Co.Ltd)   (P-28)
Aikawa, Hisanori (KIOXIA Korea)   (S1-3)
Aizawa, Takashi (NIMS)   (FB-3)
Akiyama, Toru (Mie Univ.)   (S5-2)
Akiyama, Toru (Mie Univ.)   (P-23)
Alam, Md Iftekharul (Hiroshima Univ.)   (S5-1)
Ando, Atsushi (AIST)   (S5-1)
Araidai, Masaaki (Univ. of Nagoya, Institute of Materials and Systems for Sustainability, Univ. of Nagoya)   (P-4)
Araidai, Masaki (Nagoya Univ.)   (S2-4)
Asanuma, Shutaro (AIST)   (P-16)
Ashihara, Rintaro (Kanazawa Univ.)   (P-13)

B

Baek, In-Hwan (Inha Univ.)   (P-24)
Bai, Ziheng (Chinese Academy of Sciences)   (P-6)

C

Cha, Seon Yong (SK hynix)   (S1-3)
Chen, Junjie (Nagoya Univ.)   (S4-2)
CHEN, YU-HUNG (National Kaohsiung Univ. of Science and Tech.)   (P-7)
CHEN, YU-HUNG (National Kaohsiung Univ. of Science and Tech.)   (P-10)
CHEN, ZHI-XIANG (National Kaohsiung Univ. of Science and Tech.)   (P-7)
Chi, Xilun (Kyoto Univ.)   (S1-1)
Cho, Jinyoun (Umicore)   (S4-3)
Choe, Minki (Inha Univ.)   (P-24)
Chou, Ching-Chuan (Minghsin Univ. of Science and Tech.)   (P-10)
Chu, Qiao (Univ. of Tokyo)   (S6-6)

D

Deng, Yuchen (JAIST)   (S6-2)
Depauw, Valérie (imec)   (S4-3)
Dessein, Kristof (Umicore)   (S4-3)

E

Endou, Tetsuo (Center for Innovative Integrated Electronic Systems, Univ. of Tohoku, Graduate School of Engineering
        , Univ. of Tohoku, Reserch Institute Electrical Communication, Univ. Tohoku)		   (P-4)

F

Feng, Lei (Tokyo Electron Technology Solutions)   (P-29)
Fujii, Yasuhiro (Ritsumeikan Univ.)   (S1-2)
Funaki, Nahoto (Kobe Univ.)   (S6-8)
Funakubo, Hiroshi (Tokyo Tech.)   (S1-2)
Funakubo, Hiroshi (Tokyo tech)   (S3-2)

G

Gelan, Jieensi (JAIST)   (S6-2)
Goshima, Kazuki (Tokyo City Univ.)   (P-18)
Goshima, Kazuki (Tokyo City Univ.)   (P-21)

H

Ha, Tae Jung (SK hynix)   (S1-3)
Han, Donghee (Kyung Hee Univ.)   (P-15)
Harashima, Yosuke (NAIST)   (P-4)
Hashiguchi, Gen (Shizuoka Univ.)   (S2-4)
Hashimoto, Shuichiro (Waseda Univ.)   (P-27)
Hatsuda, Kosuke (KIOXIA)   (S1-3)
Hayashi, Yusuke (Osaka Univ.)   (FA-3)
Higashimine, Koichi (JAIST)   (P-14)
Hino, Shiro (Mitsubishi Electric)   (S6-5)
Hirai, Hirohisa (AIST)   (S6-4)
Hirai, Koji (Tokyo tech)   (S3-2)
Hoffmann, Raik (Fraunhofer IPMS)   (FA-2)
Hoshi, Yusuke (Tokyo City Univ.)   (P-8)
Hoshii, Takuya (Tokyo Inst. of Tech.)   (S2-2)
Hosoi, Takuji (Kwansei Gakuin Univ.)   (S6-8)
Hosono, Hideo (Tokyo Inst. of Tech./NIMS)   (K-1)
Hoya, Katsuhiko (KIOXIA)   (S1-3)
HSIEN, YUNG-LIN (National Kaohsiung Univ. of Science and Tech.)   (P-7)
Hung, Kung-Ming (National Kaohsiung Univ. of Science and Tech.)   (S5-4)
Hwang, Cheol Seong (Seoul National Univ.)   (K-2)

I

Imamura, Ryo (Shimane Univ.)   (P-1)
Irokawa, Yoshihiro (NIMS)   (S6-1)
Isayama, Miyako (Univ. of Tokyo)   (P-2)
Ishiguro, Takuma (Saginomiya Seisakusho)   (S2-4)
Ishihama, Keisuke (Tokyo Tech.)   (S1-2)
Ishikawa, Ryousuke (Tokyo City Univ.)   (S2-3)
Isobe, Ryuuta (Nisshinbo Micro Devices)   (S5-3)
Ito, Shunichi (Tokyo City Univ.)   (S2-3)
ITO, Toshiki (Canon)   (S1-4)
Ito, Yuich (KIOXIA Korea)   (S1-3)
Iwamoto, Hayato (Osaka Univ.)   (S6-4)

J

Jang, Yoon Ho (Seoul National Univ.)   (K-2)
Jeon, Sanghun (KAIST)   (S3-1)
Jeon, Woojin (Kyung Hee Univ.)   (P-5)
Jeon, Woojin (Kyung Hee Univ.)   (P-15)
Jeon, Woojin (Kyung Hee Univ.)   (P-24)
Jeon, Woojin (Kyung Hee Univ.)   (P-28)
Jeong, Hanseok (Kyung Hee Univ.)   (P-5)
Jeong, Hanseok (Kyung Hee Univ.)   (P-24)
Jung, Bo Kyung (SK hynix)   (S1-3)
Jung, Eui Young (Kyushu Univ.)   (P-3)
Jung, Ku Youl (SK hynix)   (S1-3)

K

Kabeya, Taichi (Nagoya Univ.)   (S7-3)
Kageshima, Hiroyuki (Shimane Univ.)   (S5-2)
Kageshima, Hiroyuki (Shimane Univ.)   (P-1)
Kageshima, Hiroyuki (Shimane Univ.)   (P-23)
Kakushima, Kuniyuki (Tokyo Inst. of Tech.)   (S2-2)
Kakushima, Kuniyuki (Tokyo Inst. of Tech.)   (P-18)
Kakushima, Kuniyuki (Tokyo Inst. of Tech.)   (P-19)
Kakushima, Kuniyuki (Tokyo Inst. of Tech.)   (P-21)
Kämpfe, Thomas (Fraunhofer IPMS)   (FA-2)
Kaneko, Mitsuaki (Kyoto Univ.)   (S1-1)
Kawae, Takeshi (Kanazawa Univ.)   (P-13)
Kawahara, Masami (Kojundo Chemical Lab.)   (P-13)
Kijima, Masato (Nisshinbo Micro Devices)   (S5-3)
Kim, Bum Su (SK hynix)   (S1-3)
Kim, Dong-Gyu (Hanyang Univ.)   (S4-1)
Kim, Giuk (KAIST)   (S3-1)
Kim, Jin-Sik (R&D Team , UP Chemical Co.Ltd)   (P-28)
Kim, Seiyon (SK hynix)   (S1-3)
Kim, Seungyeon (Kyung Hee Univ.)   (P-15)
Kim, Soo Gil (KIOXIA Korea)   (S1-3)
Kim, Taeho (KAIST)   (S3-1)
Kim, Yoon-Seo (Hanyang Univ.)   (S4-1)
Kimoto, Tsunenobu (Kyoto Univ.)   (S1-1)
Kirihara, Yoshiharu (Tokyo City Univ.)   (S2-3)
Kirihara, Yoshiharu (Tokyo City Univ.)   (P-18)
Kirihara, Yoshiharu (Tokyo City Univ.)   (P-19)
Kirihara, Yoshiharu (Tokyo City Univ.)   (P-21)
Kirikoshi, Taiki (Nagoya Univ.)   (S2-4)
Kita, Koji (Univ. of Tokyo)   (S3-3)
Kita, Koji (Univ. of Tokyo)   (S6-3)
Kita, Koji (Univ. of Tokyo)   (S6-5)
Kita, Koji (Univ. of Tokyo)   (S6-6)
Kita, Koji (Univ. of Tokyo)   (S6-7)
Kobayashi, Takuma (Osaka Univ.)   (S6-4)
Kobayashi, Takumi (Tokyo City Univ.)   (P-11)
Koide, Yasuo (NIMS)   (S6-1)
Komeda, Tadahiro (Tohoku Univ.)   (S5-1)
Koreeda, Akitoshi (Ritsumeikan Univ.)   (S1-2)
Kurosawa, Masashi (Nagoya Univ.)   (S7-3)
Kuwazuru, Hajime (Kyushu Univ.)   (S7-4)

L

Lederer, Maximilian (Fraunhofer IPMS)   (FA-2)
Lee, Sung-Hoon (SK hynix)   (S1-3)
Lehninger, David (Fraunhofer IPMS)   (FA-2)
Li, Ling (Chinese Academy of Sciences)   (P-6)
Li, Yuxuan (Chinese Academy of Sciences)   (P-6)
Li, Yuxuan (Chinese Academy of Sciences)   (P-22)
Li, Zhou (Univ. of Chinese Academy of Science)   (P-9)
Lin, Jing-En (Chang-Gung Univ.)   (S2-1)
Liu, Yu-Hua (Chang-Gung Univ.)   (S2-1)
Lo, Kuang Yao (National Cheng Kung Univ.)   (S5-4)
Loo, Roger (imec)   (S4-3)
Lyu, Chuyang (Univ. of Tokyo)   (S6-3)

M

Machida, Tomoki (Univ. of Tokyo)   (FB-2)
Machida, Tomoki (Univ. of Tokyo)   (P-2)
Maekawa, Yoshiki (Tokyo tech)   (S3-2)
Mahfuz, Md Mehdee Hasan (Waseda Univ.)   (P-25)
Mahfuz, Md Mehdee Hasan (Waseda Univ.)   (P-26)
Mahfuz, Md Mehdee Hasan (Waseda Univ.)   (S7-1)
Makihara, Katsunori (Nagoya Univ.)   (S3-4)
Makihara, Katsunori (Nagoya Univ.)   (P-30)
Masanori, Kodera (Tokyo Tech.)   (S1-2)
Masunaga, Masahiro (Hitachi Research & Development Group)   (S6-6)
Matsuoka, Fumiyoshi (KIOXIA)   (S1-3)
Migita, Shinji (AIST)   (P-16)
Mikami, Kyota (Kyoto Univ.)   (S1-1)
Mikawa, Sorato (Tokyo City Univ.)   (S2-3)
Mimura, Takanori (Gakushuin Univ.)   (S1-2)
Mitani, Yuichiro (Tokyo City Univ.)   (P-11)
Mitani, Yuichiro (Tokyo City Univ.)   (P-12)
Mitani, Yuichiro (Tokyo City Univ.)   (P-18)
Mitani, Yuichiro (Tokyo City Univ.)   (P-21)
Mitsuya, Hiroyuki (Saginomiya Seisakusho)   (S2-4)
Miura, Hiromi (NIMS)   (S6-1)
Miura, Kota (Tokyo City Univ.)   (S2-3)
Miyaki, Yohei (Tokyo City Univ.)   (P-12)
Miyamoto, Manami (NIMS)   (S6-1)
Miyata, Masanori (Nisshinbo Micro Devices)   (S5-3)
Miyazaki, Seiichi (Nagoya Univ.)   (S3-4)
Miyazaki, Seiichi (Nagoya Univ.)   (P-30)
Mohit (JAIST)   (P-14)
Mohit (JAIST)   (P-17)
Moon, Hyun In (SK hynix)   (S1-3)
Morishita, Keisuke (Univ. of Nagoya)   (P-4)
Morita, Yukinori (AIST)   (P-16)
Moriwake, Hiroki (JFCC)   (S1-2)
Murayama, Yoshiki (Nisshinbo Micro Devices)   (S5-3)

N

Na, Myung-Hee (SK hynix)   (S1-3)
Nabatame, Toshihide (NIMS)   (S3-3)
Nabatame, Toshihide (NIMS)   (S6-1)
Nagaoka, Katsumi (NIMS)   (FB-3)
Nagase, Toshihiko (KIOXIA Korea)   (S1-3)
Nagata, Takahiro (NIMS)   (S3-3)
Nakada, Gen (Tokyo City Univ.)   (P-19)
Nakagawa, Kiyokazu (Abit Technologies)   (P-11)
Nakamura, Kyosuke (Kanazawa Univ.)   (P-13)
Nakamura, Takahiro (Tokyo Electron)   (P-29)
Nakanuma, Takato (Osaka Univ.)   (S6-4)
Nakatsuka, Osamu (Nagoya Univ.)   (S7-3)
Namiki, Daisuke (Waseda Univ.)   (P-25)
Nawa, Takuya (Univ. of Nagoya)   (P-4)
Ni, Zeyuan (Tokyo Electron Technology Solutions)   (P-29)
Nishimura, Yusuke (Waseda Univ.)   (P-26)
Noguchi, Munetaka (Mitsubishi Electric)   (S6-5)
Nohira, Hiroshi (Tokyo City Univ.)   (S2-3)
Nohira, Hiroshi (Tokyo City Univ.)   (P-18)
Nohira, Hiroshi (Tokyo City Univ.)   (P-19)
Nohira, Hiroshi (Tokyo City Univ.)   (P-21)

O

Ogawa, Shuichi (Nihon Univ.)   (S7-2)
Ogawa, Yutaro (Univ. of Nagoya)   (P-4)
Ohmi, Shun-ichiro (Tokyo Inst. of Tech.)   (P-20)
Ohmi, Shun-ichiro (Tokyo Inst. of Tech.)   (FB-3)
Ohta, Akio (Fukuoka Univ.)   (S3-4)
Ohta, Akio (Fukuoka Univ.)   (P-30)
Oikawa, Tadaaki (KIOXIA Korea)   (S1-3)
Okamoto, Kazuki (Tokyo Tech.)   (S1-2)
Okamoto, Kazuki (Tokyo tech)   (S3-2)
Okamoto, Mitsuo (AIST)   (S6-4)
Okazaki, Tatsuki (Tokyo City Univ.)   (P-18)
Okazaki, Tatsuki (Tokyo City Univ.)   (P-21)
Omata, Haruto (Tokyo City Univ.)   (P-11)
Onaya, Takashi (Univ. of Tokyo/NIMS)   (S3-3)
Onaya, Takashi (Univ. of Tokyo)   (P-16)
Onaya, Takashi (Univ. of Tokyo)   (S6-3)
Onaya, Takashi (Univ. of Tokyo)   (S6-7)
Ono, Tomoya (Kobe Univ.)   (S6-8)
Onodera, Momoko (Univ. of Tokyo)   (P-2)
Ota, Hiroyuki (AIST)   (P-16)

P

Park, Jin-Seong (Hanyang Univ.)   (S4-1)
Pati, Satya Prakash (Kyushu Univ.)   (FA-1)
Porret, Clément (imec)   (S4-3)

R

Revello, Ricardo (Fraunhofer IPMS)   (FA-2)
Ryu, Hyun-Kyu (R&D Team , UP Chemical Co.Ltd)   (P-28)
Ryu, YoungUk (Kyung Hee Univ.)   (P-28)

S

Saito, Mizuho (JAIST)   (P-14)
Saito, Mizuki (JAIST)   (P-17)
Sakai, Akira (Osaka Univ.)   (FA-3)
Sakashita, Mitsuo (Nagoya Univ.)   (S7-3)
Sano, Yunosuke (Nagoya Univ.)   (S3-4)
Sasaki, Ryu (Univ. of Tokyo)   (S6-7)
Sawada, Tomomi (NIMS)   (S6-1)
Seidel, Konrad (Fraunhofer IPMS)   (FA-2)
Sekiguchi, Yuki (Tokyo Inst. of Tech.)   (P-20)
Seo, Soo Man (SK hynix)   (S1-3)
Shibata, Yasushi (Shizuoka Univ.)   (S2-4)
Shibayama, Shigehisa (Nagoya Univ.)   (S7-3)
Shim, Sung Keun (Seoul National Univ.)   (K-2)
Shima, Akio (Hitachi Research & Development Group)   (S6-6)
Shimizu, Takao (NIMS)   (S1-2)
Shimizu, Takao (NIMS)   (S3-2)
Shimura, Reijiro (Tokyo Tech.)   (S1-2)
Shimura, Takayoshi (Osaka Univ.)   (S6-4)
Shiraishi, Kenji (Nagoya Univ.)   (S2-4)
Shiraishi, Kenji (Nagoya Univ.)   (S4-2)
Shiraishi, Kenji (Nagoya Univ.)   (S5-2)
Shiraishi, Kenji (Univ. of Nagoya, Institute of Materials and Systems for Sustainability, Univ. of Nagoya)   (P-4)
Shiraishi, Kenji (Nagoya Univ.)   (P-23)
Shiraishi, Takahisa (Tokyo Tech.)   (S1-2)
Solís-Fernández, Pablo (Kyushu Univ.)   (P-3)
Sometani, Mitsuru (Osaka Univ./AIST)   (S6-4)
Song, Long-Fu (National Cheng Kung Univ.)   (S5-4)
Sünbül, Ayse (Fraunhofer IPMS)   (FA-2)
Suzuki, Tatsuya (Tokyo City Univ.)   (P-12)
Suzuki, Toshi-kazu (JAIST)   (S6-2)

T

Tachiki, Keita (Kyoto Univ.)   (S1-1)
Taguchi, Ayako (JFCC)   (S1-2)
Takagi, Komei (Nagoya Univ.)   (S7-3)
Takahashi, Yuma (Tokyo Tech.)   (S1-2)
Takakuwa, Yuji (Tohoku Univ.)   (S7-2)
Takaoka, Tsuyoshi (Tohoku Univ.)   (S5-1)
Takezaki, Yuusuke (Nisshinbo Micro Devices)   (S5-3)
Taniguchi, Takashi (NIMS)   (P-2)
Taniguchi, Takashi (NIMS)   (P-8)
Taoka, Noriyuki (Aichi Inst. of Tech.)   (S3-4)
Taoka, Noriyuki (Aichi Inst. of Tech.)   (P-30)
Teramoto, Akinobu (Hiroshima Univ.)   (S5-1)
Tohei, Tetsuya (Osaka Univ.)   (FA-3)
Tokita, Yukimura (Tokyo Inst. of Tech.)   (S2-2)
Tokumitsu, Eisuke (JAIST)   (P-14)
Tokumitsu, Eisuke (JAIST)   (P-17)
Toshiyoshi, Hiroshi (Univ. of Tokyo)   (S2-4)
Tsai, Sung-Lin (Tokyo Inst. of Tech.)   (S2-2)
Tsuda, Yasutaka (Japan Atomic Energy Agency)   (S7-2)
Tsukagoshi, Kazuhito (NIMS)   (S3-3)
Tsukagoshi, Kazuhito (NIMS)   (S6-1)
Tsutsui, Kazuo (Tokyo Inst. of Tech.)   (S2-2)
Tsutsumi, Tomoya (Tokyo City Univ.)   (P-18)
Tsutsumi, Tomoya (Tokyo City Univ.)   (P-21)

U

Uemoto, Mitsuharu (Kobe Univ.)   (S6-8)
Uryu, Kazuya (JAIST)   (S6-2)

W

Wakabayashi, Hitoshi (Tokyo Inst. of Tech.)   (S2-2)
Wang, Dong (Kyushu Univ.)   (S4-3)
Wang, Dong (Kyushu Univ.)   (S7-4)
Wang, Jer-Chyi (Chang-Gung Univ.)   (S2-1)
Wang, Jiayi (Chinese Academy of Sciences)   (P-6)
Wang, Jiayi (Chinese Academy of Sciences)   (P-22)
Wang, Runze (Univ. of Tokyo)   (S6-5)
Wang, Shengkai (Chinese Academy of Sciences)   (P-6)
Wang, Shengkai (Chinese Academy of Sciences)   (P-22)
Watanabe, Heiji (Osaka Univ.)   (S6-4)
Watanabe, Hirobumi (W. T. C.)   (S5-3)
Watanabe, Kenji (NIMS)   (P-2)
Watanabe, Kenji (NIMS)   (P-8)
Watanabe, Rukuto (Waseda Univ.)   (S7-1)
Watanabe, Takanobu (Waseda Univ.)   (P-25)
Watanabe, Takanobu (Waseda Univ.)   (P-26)
Watanabe, Takanobu (Waseda Univ.)   (P-27)
Watanabe, Takanobu (Waseda Univ.)   (S7-1)
Wu, Zhicheng (Chinese Academy of Sciences)   (P-6)

X

XIA, YU-HENG (National Kaohsiung Univ. of Science and Tech.)   (P-7)
Xu, Yang (Chinese Academy of Sciences)   (P-6)
Xu, Yang (Chinese Academy of Sciences)   (P-22)

Y

Yadav, Nandakishor (Fraunhofer IPMS)   (FA-2)
Yajima, Takeaki (Kyushu Univ.)   (FA-1)
Yamamoto, Keisuke (Kyushu Univ.)   (S4-3)
Yamamoto, Keisuke (Kyushu Univ.)   (P-3)
Yamamoto, Keisuke (Kyushu Univ.)   (S7-4)
Yamamoto, Ryohei (Osaka Univ.)   (FA-3)
Yamamura, Rikuto (Tokyo City Univ.)   (P-8)
Yamashita, Takehiko (Nisshinbo Micro Devices)   (S5-3)
Yamashita, Yoshiyuki (NIMS)   (S3-3)
YANG, CHI-DA (National Kaohsiung Univ. of Science and Tech.)   (P-7)
Yang, Guanhua (Chinese Academy of Sciences)   (P-6)
Yasui, Akira (JASRI)   (S2-3)
Yasui, Akira (JASRI)   (P-18)
Yasui, Akira (JASRI)   (P-19)
Yen, Ting-Yu (National Cheng Kung Univ.)   (S5-4)
Yokota, Kazuma (Kobe Univ.)   (S6-8)
Yoo, Soo Min (Kyung Hee Univ.)   (P-24)
Yoo, Soomin (Kyung Hee Univ.)   (P-5)
Yoshida, Tomoki (Tokyo City Univ.)   (S2-3)
Yoshigoe, Akitaka (Japan Atomic Energy Agency)   (S7-2)
Yoshino, Kenichi (KIOXIA Korea)   (S1-3)
You, Nannan (Chinese Academy of Sciences)   (P-6)
You, Nannan (Chinese Academy of Sciences)   (P-22)

Z

Zhang, Kuo (Chinese Academy of Sciences)   (P-6)
Zhang, Kuo (Chinese Academy of Sciences)   (P-22)
Zhang, Qian (Chinese Academy of Sciences)   (P-22)