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International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY
Session K1
Keynote Speech (I)
Time: 13:10 - 14:00 Friday, January 21, 2011
K1-1
(Time: 13:10 - 14:00)
Title
(Keynote Address)
Changing Paradigm for Advanced Gate Stack Evaluation: Reliability Modeling at Atomic Structure Level
Author
*
Gennadi Bersuker (SEMATECH, U.S.A.)
Page
p. 151