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2013 International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY
Session K1
Keynote 1
Time: 13:30 - 14:30 Thursday, November 7, 2013
Chair: Masaaki Niwa (Tohoku Univ., Japan)
K1-1
(Time: 13:30 - 14:30)
Title
(Keynote Address)
Materials Challenge for 10nm Technology and Beyond
Author
*
Kathy Barla (Imec, Belgium)
Page
pp. 1 - 2