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International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY

Session S7  Modeling and Simulations / Oxide Growth
Time: 10:30 - 12:20 Friday, November 7, 2008
Chairs: Yuji Takakuwa (Tohoku Univ., Japan), Kenji Shiraishi (Tsukuba Univ., Japan)

S7-1 (Time: 10:30 - 11:00)
Title(Invited Paper) Structure and Properties of Defects in HfO2 and at Interfaces with SiO2
AuthorDavid Munoz Ramo (Univ. College London, Great Britain), Jacob Gavartin (Accelrys Ltd, Great Britain), Peter Sushko, *Alexander Shluger (Univ. College London/Tohoku Univ., Great Britain)
Pagepp. 141 - 142

S7-2 (Time: 11:00 - 11:20)
TitleRelationship between the Dipole Moment Induced in Photoemission Process and the Optical Dielectric Constant
Author*Kazuyuki Hirose, Daisuke Kobayashi (JAXA, Japan), Haruhiko Suzuki, Satoshi Igarashi, Hiroshi Nohira (Musashi Inst. of Tech., Japan)
Pagepp. 143 - 144

S7-3 (Time: 11:20 - 11:40)
TitleApplication of Franz Dispersion Relation in Simulations of Tunneling Transport in MIS and SONOS/TANOS Structures
Author*Mikhail I. Vexler, Angelika Kuligk, Bernd Meinerzhagen (TU Braunschweig, Institut fuer Elektronische Bauelemente und Schaltungstechnik, Germany)
Pagepp. 145 - 146

S7-4 (Time: 11:40 - 12:00)
TitleReaction Mechanisms of H2O Molecules at SiO2/Si Interfaces during Silicon Thermal Oxidation
Author*Toru Akiyama (Mie Univ., Japan), Hiroyuki Kageshima (NTT, Japan), Masashi Uematsu (Keio Univ., Japan), Tomonori Ito (Mie Univ., Japan)
Pagepp. 147 - 148

S7-5 (Time: 12:00 - 12:20)
TitleThermodynamics and Kinetics of Thermal Oxidation of Ge in High Pressure Oxygen
Author*Kosuke Nagashio, Koji Kita, C. H. Lee, Tomonori Nishimura, Akira Toriumi (Univ. of Tokyo, Japan)
Pagepp. 149 - 150