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International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY

Session S5  High Mobility Channel
Time: 13:40 - 15:30 Thursday, November 6, 2008
Chairs: Akira Nishiyama (Toshiba, Japan), Yoshinari Kamakura (Osaka Univ., Japan)

S5-1 (Time: 13:40 - 14:10)
Title(Invited Paper) Integration of High-k Gate Dielectrics on High Mobility Channel Materials
Author*Sungjoo Lee, J. Q. Lin, H. J. Oh (National Univ. of Singapore, Singapore), G. Q. Lo, D. L. Kwong (Institute of Microelectronics, Singapore), D. Z. Chi (Institute of Materials Research and Engineering, Singapore)
Pagepp. 77 - 78

S5-2 (Time: 14:10 - 14:30)
TitleImproved MIS Characteristics of HfO2/GaAs Interfaces with Ultrathin Epitaxial Ge Interface Layers
AuthorTetsuji Yasuda, *Noriyuki Miyata (AIST, Japan), Akihiro Ohtake (National Inst. for Materials Science, Japan)
Pagepp. 79 - 80

S5-3 (Time: 14:30 - 14:50)
TitleStudy of Electron Mobility of Ge n-MOSFETs with High Pressure Oxidized GeO2
Author*Tomonori Nishimura, Choong Hyun Lee, Koji Kita, Kosuke Nagashio, Akira Toriumi (Univ. of Tokyo, Japan)
Pagepp. 81 - 82

S5-4 (Time: 14:50 - 15:10)
TitleA Study on Electronic Structure of Silicon Nanowires with Diverse Diameters and Orientations for High Performance FET
Author*Yeonghun Lee (Tokyo Inst. of Tech., Japan), Takahiro Nagata (Univ. of Tsukuba, Japan), Kuniyuki Kakushima (Tokyo Inst. of Tech., Japan), Kenji Shiraishi (Univ. of Tsukuba, Japan), Hiroshi Iwai (Tokyo Inst. of Tech., Japan)
Pagepp. 83 - 84

S5-5 (Time: 15:10 - 15:30)
TitleEvaluation of Transconductance Enhancement of <110> and <100> -Channel Strained Si Nanowire Field-Effect Transistors
Author*Aya Seike, Ikushin Tsuchida (Waseda Univ., Japan), Daisuke Kosemura, Atsushi Ogura (Meiji Univ., Japan), Takanobu Watanabe, Iwao Ohdomari (Waseda Univ., Japan)
Pagepp. 85 - 86