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2006 International Workshop on Dielectric Thin Films for Future ULSI Devices

Session S9 Reliability
Time: 14:50 - 16:20 Friday, November 10, 2006
Chairs: Shimpei Tsujikawa (Renesas Technology Corp., Japan), Kazuo Tsutsui (Tokyo Inst. of Tech., Japan)

S9-1 (Time: 14:50 - 15:20)
Title(Invited Paper) Biased Temperature Stability Testing of Metal Gates and High-k (HfSiON) Gate Dielectrics
AuthorAjit Shanware, J. McPherson, M.R. Visokay, J. J. Chambers, M. Ramin, C. Huffman, P. Kohli, L. Colombo (Texas Instruments, United States)
Pagepp. 139 - 140

S9-2 (Time: 15:20 - 15:40)
TitleRecovery Mechanism of Stress-induced Leakage Current by Bias Annealing in Thin Gate Oxide
AuthorRenichi Yamada, Yasuhiro Shimamoto, Kikuo Watanabe (Hitachi, Ltd., Japan)
Pagepp. 141 - 142

S9-3 (Time: 15:40 - 16:00)
TitleExperimental Evidence of Nit-related and –unrelated Mechanisms for NBTI with Ultra-thin SiON Gate Dielectric
AuthorShigeto Fukatsu, Daisuke Hagishima, Yuichiro Mitani, Kazuya Matsuzawa , Koichiro Inoue (Toshiba Co., Japan)
Pagepp. 143 - 144

S9-4 (Time: 16:00 - 16:20)
TitleGeneration of Electrode-Side Traps under NBT Stress in Metal/HfSiON PFETs and its Impact on Floating Body Effect of SOI Devices
AuthorFumio Ootsuka, Takahisa Eimori, Yasuo Nara, Yuzuru Ohji (Selete, Japan)
Pagepp. 145 - 146