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2015 International Workshop on
DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY
Session K1
Keynote 1
Time: 13:10 - 14:10 Monday, November 2, 2015
Chairs: Toyohiro Chikyow (NIMS, Japan), Shinji Migita (AIST, Japan)
K1-1
(Time: 13:10 - 14:10)
Title
(Keynote Address)
High Performance NEMS Devices for Emerging Sensing Embedded Applications and Integration in CMOS Devices
Author
*
Thomas Ernst (CEA Leti, France)
Page
pp. 1 - 4