| Title | Simultaneous Template Optimization and Mask Assignment for DSA with Multiple Patterning |
| Author | *Jian Kuang, Junjie Ye, Evangeline F.Y. Young (Chinese Univ. of Hong Kong, Hong Kong) |
| Page | pp. 75 - 82 |
| Detailed information (abstract, keywords, etc) | |
| Title | Mask Optimization for Directed Self-Assembly Lithography: Inverse DSA and Inverse Lithography |
| Author | *Seongbo Shim, Youngsoo Shin (KAIST, Republic of Korea) |
| Page | pp. 83 - 88 |
| Detailed information (abstract, keywords, etc) | |
| Title | Cut Redistribution with Directed Self-Assembly Templates for Advanced 1-D Gridded Layouts |
| Author | *Zhi-Wen Lin, Yao-Wen Chang (National Taiwan Univ., Taiwan) |
| Page | pp. 89 - 94 |
| Detailed information (abstract, keywords, etc) | |
| Title | Contact Layer Decomposition To Enable DSA With Multi-patterning Technique For Standard Cell Based Layout |
| Author | Zigang Xiao, Chun-Xun Lin, *Martin D.F. Wong (Univ. of Illinois, Urbana-Champaign, U.S.A.), Hongbo Zhang (Synopsys, U.S.A.) |
| Page | pp. 95 - 102 |
| Detailed information (abstract, keywords, etc) | |